SILICON-ON-INSULATOR PHOTONICS University of Michigan
Andrew Lyle Robinson
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Silicon on insulator
43 Figures and Tables
TABLE 1.1 Classification of Control of Optical Guided Modes (adapted from Nishihara et al. [I)
Figure 1.1 Basic Silicon on Insulator (SOI) waveguide structure
Figure 1.3 Four types of silicon compatible waveguides.
Figure 2.1 Schematic representation of a silicon micro-bridge integrated test structure.
TABLE 2.1 Test Structure Specifications
Figure 2.2 Schematic representation of a silicon micro-cantilever beam integrated test structure
Figure 2.3 Additional test structures included to assess effects of structural components. Three different guide widths are used in each case.
Figure 2Z5 Hypothetical cross section of a completed device
Figure 3.1 Basic EMO device structures: (a) Simple raised strip channel guide, (b) Micro-bridge and (c) Cantilever beam
TABLE 3.1 Relevant Silicon and Silicon Dioxide Material Constants [30,311
Figure 3.10 The evanescent field extends further into the region where the index of refraction is larger.
Figures 3.11 Ray Picture of the Goos-Hdnchen Shift
Figure 3.12 Mode versus penetration depth at constant height
Figure 3.13 Curvature loss model
Figure 3.14 Symmetric and asymmetric branch waveguides,
Figure 3.15 Transmission losses versus guiding angle.
Figure 3.17 Three dimensional perspective drawing of the micro-bridge after deflection
Figure 3.18 Computational model for path length variation as a function of deflection, dx
Figure 3.19 Double Cantilevered Beam (Bridge)
Figure 3.2 Cross section of a Raised Strip Channel Guide
Figure 3.20 Geometrir c-ecification of a double cantilever beam (bridge)
Figure 3.21 (a) Micro-Bridge deflection versus applied voltage
Figure 3.21 (b) Micro-Bridge deflection versus applied voltage
Figure 3.22 Attenuation due to evanescent coupling through the oxide to the silicon substrate
Figure 3.23 Index Variation as a function of Mlicro-Bridge Deflection
Figure 3.24 Three dimensional perspective drawing of
Figure 3.25 Single cantilevered beam
Figure 3.26 Geometric specification of a cantilever beam
Figure 3.28 (a) Deflection of m-icro-cantilever beam as a function of voltage
Figure 3.28 (b Deflection of micro-cantilever beam as a function of voltage
Figure 3.29 Geometric definitions of tilt, offset and end separation
Figure 3.3 Cross Sections of a Buried Channel Guide
Figure 3.30 Total internal reflection at the exit plane
Figure 3.31 Wave Penetration of a finite potential barrier
Figure 3.32 Transmidssion as a function of gap separation
Figure 3.33 Because of the large index difference there is no input ray (A or B) that provides a guided mode angle (0 A or 0 B) between the critical angle and 74 °. Therefore the endfire coupling mode requires a guide height such
Figure 3.34 One potential method of interconnect is a simple right angle cross.
Figure 3.4 Side View of a Cantilever Beam
Figure 3.5 Cartesian Coordinate System Referenced to the Waveguide
Figure 3.6 Transmidssion of light across a dielectric interface
Figure 3.7 Ray optic model of light propagation in a waveguide
Figure 3.8 (a) Mode Angle m=0 as a Function of Waveguide Height
Figure 3.8 (b) Mode Angle Versus Mode at Constant Height
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